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Piezoelectric SPDT NEMS Switch for Complementary Logic

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Document pages: 4 pages

Abstract: Off-state current leakage and switching delay has become the main challengefor continued complementary metal-oxide-semiconductor (CMOS) technologyscaling. Previous work proposes a "see-saw " relay structure to mimic theoperation of CMOS. This paper presents a novel single-pole double-throw (SPDT)switch structure based on AlN piezoelectric cantilever beam to improve theformer "see-saw " relay structure. Geometry parameters are given and key switchparameters such as actuation voltage, switching time and contact force havebeen calculated and compared with previous "see-saw " relay structure. Analysisand design process is shown and micro-fabrication process is described as well.

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