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A Comprehensive Review on Heat Transfer Design Parameters in MEMS through Experimentations and Numerical Modeling

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Abstract: Micro electro mechanical systems are studied in this paper along to comparingthe design, fabrication, and operation of such devices especially in theelectronic industry. The advancements of such systems are important as scalereduction is becoming more economical and also in heat dissipation efficiencies.Furthermore, the fabrication techniques are becoming more of a challengein today’s industrial market. In this paper we will introduce a comparativestudy of experimental research in the micro scale heat exchanger with varietiesof industrial application primarily cooling integrated circuits. Significanteffect in the process of cooling electronic devices has showed experimentallythat scale variations impact into this improvement. Numerical studieshave been a leading technique in the development of thermal systems especiallyat the micro or small scales which helps the industry to cut cost andprovide innovative products at high efficiencies. There are so many approachesto numerical analysis and research, where the availability of ready touse software and data acquisition modules is variant. Material selection is alsoa variable in the efficiency and operations of these micro channel thermal systemand heat exchangers.

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