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Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO3) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

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Document pages: 17 pages

Abstract: Interest in energy harvesters has grown rapidly overthe last decade. The cantilever shaped piezoelectric energy harvesting beam isone of the most employed designs, due to its simplicity and flexibility forfurther performance enhancement. The research effort in the MEMS Piezoelectric vibration energy harvester designed using threetypes of cantilever materials, Lithium Niobate (LiNbO3), AluminumNitride (AlN) and Zinc Oxide (ZnO) with different substrate materials:aluminum, steel and silicon using COMSOL Multiphysics package were designed andanalyzed. Voltage, mechanical power and electrical power versus frequency fordifferent cantilever materials and substrates were modeled and simulated usingFinite element method (FEM). The resonant frequencies of the LiNbO3 Al,AlN Al and ZnO Al systems were found to be 187.5 Hz, 279.5 Hz and 173.5 Hz,respectively. We found that ZnO Al system yields optimum voltage and electricalpower values of 8.2 V and 2.8 mW, respectively. For ZnO cantilever on aluminum,steel and silicon substrates, we found the resonant frequencies to be 173.5 Hz, 170 Hz and 175Hz, respectively. Interestingly, ZnO steelyields optimal voltage and electrical power values of 9.83 V and 4.02mW, respectively. Furthermore, all systems were studied at differentdifferentiate frequencies. We found that voltage and electrical power haveincreased as the acceleration has increased.

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