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Effect of argon oxygen mixture on TiO2 coating during magnetron sputtering

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Document pages: 6 pages

Abstract: Titanium dioxide coating was deposited on stainless steel substrate by reactive RF magnetron sputtering without deliberate heating or bias. The purpose of this work is to study the effect of argon oxygen mixture on the corrosion behavior of TiO2 coating. The morphology and structure of the coating were studied by X-ray diffraction (XRD). The corrosion behavior of the coating was studied by potentiodynamic polarization method. The potentiodynamic polarization curve shows that TiO2 coating has higher corrosion resistance than uncoated substrate.

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