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Effect of hppms pulse frequency on properties of plasma discharge and deposited AlTiN coating

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Document pages: 18 pages

Abstract: TiAlN (titanium content more than 50 ) or AlTiN (aluminum content more than 50 ) coatings are recognized as hard wear-resistant tool coatings, which are usually prepared by physical vapor deposition (PVD) such as arc evaporation or DC magnetron sputtering (DCMs). With the increasing challenges of operating conditions, there is a continuous need to improve mechanical properties to withstand extreme load conditions. This can be achieved by a large number of ionized sputtered metal atoms during deposition. In order to improve metal ion flux, high power pulsed magnetron sputtering (hppms) technology was developed. In order to understand the relationship between hppms process parameters and the mechanical properties of AlTiN coating, different pulses were discussed in this studyfrequencies (for a constant pulse length) influence AlTiN coating structure growth and their mechanical properties. In addition, film deposition rate and phase formation are influenced by altering process parameters like pulse length and frequency. Hence, different pulse-frequencies produce specific coatings with corresponding properties for functional requirements. Based on the established findings, answers to new scientific queries along with the demand to further optimize these coatings for tool applications are required.

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