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Properties of ceramic substrate materials for high temperature pressure sensors above 1000 ℃

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Document pages: 6 pages

Abstract: In order to determine Sue substrate materials suitable for high temperature pressure sensors operating above 1000 ° C, the high temperature properties of four high-performance ceramics (99 pure Al2O3 (99al2o3), 97 pure Al2O3 (97al2o3), sapphire and ZrO2) were studied. The bending strength and modulus of these ceramics were measured by three-point bending test, and their thermal conductivity was measured by transient laser emission. The sample was prepared by hot pressing and sintering: flat plate with size of 3.5   ×  5.  ×   50   for bending test and φ 12.5 mm3 of rod   ×   1.5   mm3 for thermal conductivity measurement. The curves of bending strength, bending modulus and thermal conductivity with temperature were obtained. The results show thatthat the flexural strength and thermal conductivity of sapphire are much greater than those of the other ceramics tested. Thus, we conclude that sapphire is the most appropriate of these materials for use in high-temperature pressure sensors for operation at up to 1000°C.

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